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Valeri Dravin

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Enhanced Broadband IR Absorption and Electrical Characteristics of Silicon Variably Hyperdoped by Sulfur (1018-1021 Cm-3) by Ion Implantation/Pulsed Laser Annealing

Number of pages: 15 Posted: 20 Jun 2024
Ivan Podlesnykh, Michael S. Kovalev, Alena Nastulyavichus, Nikita Stsepuro, Sergey Pushkarev, Elizaveta Kozlova, Valeri Dravin, Andrey Vlasov, Pavel Platonov and Sergey Kudryashov
Bauman Moscow State Technical University, Bauman Moscow State Technical University, Bauman Moscow State Technical University, Bauman Moscow State Technical University, affiliation not provided to SSRN, Bauman Moscow State Technical University, affiliation not provided to SSRN, Bauman Moscow State Technical University, Bauman Moscow State Technical University and Bauman Moscow State Technical University
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Abstract:

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silicon, hyperdoping, ion implantation, pulsed laser annealing, optical and electrical impurity activation