Brigadirskiy pereulok, 14
Moscow, 105005
Russia
Bauman Moscow State Technical University
silicon, hyperdoping, ion implantation, pulsed laser annealing, optical and electrical impurity activation
nanosecond laser, Si wafer, liquid-nitrogen environment, plasma activation of nitrogen, nitridation and nitrogen doping of Si, nano-recrystallization of Si
silicon, hyperdoping, Raman analysis, IR spectrophotometry, stress, grain size
silicon, hyperdoping, gold implantation, laser annealing, optical femtosecond laser pump/THz probe, carrier relaxation