default author photo

V.A. Shakhnov

Bauman Moscow State Technical University

Brigadirskiy pereulok, 14

Moscow, 105005

Russia

  • Bauman Moscow State Technical University

SCHOLARLY PAPERS

2

DOWNLOADS

73

TOTAL CITATIONS

1

Scholarly Papers (2)

Actions:
Email selected abstracts
1.

Nanosecond-Laser Nitridation and Nitrogen Doping of Silicon Wafer Surface in Liquid Nitrogen

Number of pages: 14 Posted: 15 Jul 2024
Sergey Kudryashov, Alena Nastulyavichus, Victoria Pryakhina, V.P. Martovitsky, E.V. Ulturgasheva, Michael S. Kovalev, Ivan Podlesnykh, N.G. Stsepuro and V.A. Shakhnov
Bauman Moscow State Technical University, Bauman Moscow State Technical University, Ural Federal University, affiliation not provided to SSRN, affiliation not provided to SSRN, Bauman Moscow State Technical University, Bauman Moscow State Technical University, affiliation not provided to SSRN and Bauman Moscow State Technical University
Downloads 38 (1,209,354)
Citation 1

Abstract:

Loading...

nanosecond laser, Si wafer, liquid-nitrogen environment, plasma activation of nitrogen, nitridation and nitrogen doping of Si, nano-recrystallization of Si

2.

Advanced non-contact Raman/spectrophotometric deciphering of structural processes in sulfur-implanted/laser-annealed silicon

Number of pages: 8 Posted: 04 Sep 2025
Sergey Kudryashov, Ivan Podlesnykh, Valery A. Dravin, Michael S. Kovalev, Sergei G. Buga, George Krasin, E.V. Ulturgasheva, Alena Nastulyavichus, Evgeny V. Kuzmin, V.A. Shakhnov, Nikita Dolzhenko and Anastasiya G. Bondarenko
Bauman Moscow State Technical University, Bauman Moscow State Technical University, affiliation not provided to SSRN, Bauman Moscow State Technical University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Bauman Moscow State Technical University, affiliation not provided to SSRN, Bauman Moscow State Technical University, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 35 (1,263,436)

Abstract:

Loading...

silicon, hyperdoping, Raman analysis, IR spectrophotometry, stress, grain size