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V.P. Martovitsky

affiliation not provided to SSRN

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Nanosecond-Laser Nitridation and Nitrogen Doping of Silicon Wafer Surface in Liquid Nitrogen

Number of pages: 14 Posted: 15 Jul 2024
Sergey Kudryashov, Alena Nastulyavichus, Victoria Pryakhina, V.P. Martovitsky, E.V. Ulturgasheva, Michael S. Kovalev, Ivan Podlesnykh, N.G. Stsepuro and V.A. Shakhnov
Bauman Moscow State Technical University, Bauman Moscow State Technical University, Ural Federal University, affiliation not provided to SSRN, affiliation not provided to SSRN, Bauman Moscow State Technical University, Bauman Moscow State Technical University, affiliation not provided to SSRN and Bauman Moscow State Technical University
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nanosecond laser, Si wafer, liquid-nitrogen environment, plasma activation of nitrogen, nitridation and nitrogen doping of Si, nano-recrystallization of Si