default author photo

Bangxu Liu

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

DOWNLOADS

214

TOTAL CITATIONS

1

Scholarly Papers (2)

Actions:
Email selected abstracts
1.

Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor–Critic Reinforcement Learning

Number of pages: 41 Posted: 03 Jul 2024
Bangxu Liu, Dewen Zhao, Xinchun Lu and Yuhong Liu
affiliation not provided to SSRN, Tsinghua University, Tsinghua University and Tsinghua University
Downloads 110 (640,165)

Abstract:

Loading...

Keywords: Chemical mechanical planarization, Advanced process control, Distributional reinforcement learning, Soft actor-critic reinforcement learning

2.

Run-to-Run Control of a Multizone Chemical Mechanical Planarization Process Based on Distributional Soft Actor–Critic Reinforcement Learning

Number of pages: 40 Posted: 02 Sep 2024
Bangxu Liu, Dewen Zhao, Xinchun Lu and Yuhong Liu
affiliation not provided to SSRN, Tsinghua University, Tsinghua University and Tsinghua University
Downloads 104 (674,591)
Citation 1

Abstract:

Loading...

Chemical mechanical planarization, Advanced process control, Distributional reinforcement learning, Virtual Metrology；Soft actor-critic reinforcement learning