Yanjun Wang

University of Science and Technology of China (USTC)

No. 96 Jinzhai Road

Hefei, 230026

China

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Elimination of Oisf in Large-Size Si Substrate for Low Warpage and Crack-Free Gan Epitaxial Wafer

Number of pages: 12 Posted: 09 Aug 2024

Yanjun Wang, Fei Huang, Wenxian Yang, Jianjun Zhu and Shulong Lu

University of Science and Technology of China (USTC), affiliation not provided to SSRN, Chinese Academy of Sciences (CAS), affiliation not provided to SSRN and Chinese Academy of Sciences (CAS)

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