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Changsoo Lee

Samsung Electronics Co., Ltd.

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Scholarly Papers (1)

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Low-Temperature Chemical Vapor Deposition of Sn-Based Metal-Organic Films for Photoresponsive Dry Resist Applications

Number of pages: 21 Posted: 07 May 2026
Hyekyung Kim, Haneul Park, Kyungryul Ha, Dong Geun Kim, Eunhye Lee, Byeongsun Yoo, Taemin Kim, Se Jun Park, Sejin Kyung, Changsoo Lee, Ji-hoon Ahn, Tae Joo Park and Woo-Hee Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Hanyang University, Hanyang University and Hanyang University
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Low-temperature chemical vapor deposition, Sn-based metal-organic films, Photochemical transformation, Deep ultraviolet lithography, Dry resist