Longfei Xu

Yanshan University

School of Information Science and Engineering

Qinhuangdao

China

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Effect of Grain Size and Orientation on Magnetron Sputtering Yield of Tantalum

Number of pages: 18 Posted: 25 Sep 2024

Kai Yu, xin xue, Longfei Xu, Guipeng Li, Xiaodan Zhang and Yuhui Wang

Yanshan University, Yanshan University, Yanshan University, affiliation not provided to SSRN, Technical University of Denmark and Yanshan University

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