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Xiaodan Zhang

Technical University of Denmark

Lyngby

Denmark

SCHOLARLY PAPERS

1

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39

TOTAL CITATIONS

1

Scholarly Papers (1)

1.

Effect of Grain Size and Orientation on Magnetron Sputtering Yield of Tantalum

Number of pages: 18 Posted: 25 Sep 2024
Yanshan University, Yanshan University, Yanshan University, affiliation not provided to SSRN, Technical University of Denmark and Yanshan University
Downloads 39 (1,236,159)
Citation 1

Abstract:

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Tantalum target, electron beam melting, sputtering rate, deposition rate, grain size and orientation