Yunqi Peng

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Oxidation of Silicon on Substrate Induced Bubble-Like Damage of Mo/Si Mirror Irradiated by Femtosecond Euv Pulses

Number of pages: 10 Posted: 17 Oct 2024
Jiahao Li, Yunqi Peng, Yuanan Zhao, Xiangyu Zhu, Ligong Ke, Jiaoling Zhao, Ge Zhang, Tao Wang, zhilin xia, Zhangfan Wei, Xiaoran Li and Jianda Shao
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Laboratory of Thin Film Optics, affiliation not provided to SSRN, Wuhan University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Extreme ultraviolet laser damage, femtosecond lasers, Mo/Si multilayers coatings, Monte Carlo simulation