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Xiaoran Li

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

3

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181

TOTAL CITATIONS

0

Scholarly Papers (3)

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1.

Freestanding Zr-Based Multilayer Filters: Euv Transmission Performance and Irradiation Stability

Number of pages: 17 Posted: 28 Sep 2023
Jing-Tao Zhu, Sheng Guo, Jiaoling Zhao, Xiaoran Li, Jianda Shao, Hongjun Zhou and Tonglin Huo
Tongji University, Tongji University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) and University of Science and Technology of China (USTC)
Downloads 134 (547,695)

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Extreme ultraviolet, Zr-based filters, magnetron sputtering, Multilayer, stability

2.

Oxidation of Silicon on Substrate Induced Bubble-Like Damage of Mo/Si Mirror Irradiated by Femtosecond Euv Pulses

Number of pages: 10 Posted: 17 Oct 2024
Jiahao Li, Yunqi Peng, Yuanan Zhao, Xiangyu Zhu, Ligong Ke, Jiaoling Zhao, Ge Zhang, Tao Wang, zhilin xia, Zhangfan Wei, Xiaoran Li and Jianda Shao
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Laboratory of Thin Film Optics, affiliation not provided to SSRN, Wuhan University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 46 (1,109,210)

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Extreme ultraviolet laser damage, femtosecond lasers, Mo/Si multilayers coatings, Monte Carlo simulation

3.

Physics-guided virtual detector for uncertainty-aware EUV transmission metrology with a compact Xe laser-produced plasma EUV source

Number of pages: 15 Posted: 05 Jun 2026
Jingjing Gao, Yichi Yao, Boyu Wang, Chengnan He, Wenhua Wang, Xingzhi Yan, Xiaoran Li, Jiaoling Zhao and Gang Xin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Extreme ultraviolet metrology, Xe laser-produced plasma, Virtual detector, Transmission measurement, Physics-Guided Learning, Uncertainty evaluation