Hongjun Zhou

University of Science and Technology of China (USTC)

No. 96 Jinzhai Road

Hefei, 230026

China

  • University of Science and Technology of China (USTC)

SCHOLARLY PAPERS

1

DOWNLOADS

76

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Freestanding Zr-Based Multilayer Filters: Euv Transmission Performance and Irradiation Stability

Number of pages: 17 Posted: 28 Sep 2023
Jing-Tao Zhu, Sheng Guo, Jiaoling Zhao, Xiaoran Li, Jianda Shao, Hongjun Zhou and Tonglin Huo
Tongji University, Tongji University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) and University of Science and Technology of China (USTC)
Downloads 76 (684,889)

Abstract:

Loading...

Extreme ultraviolet, Zr-based filters, magnetron sputtering, Multilayer, stability