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Jing-Tao Zhu

Tongji University

1239 Siping Road

Shanghai, 200092

China

  • Tongji University

SCHOLARLY PAPERS

2

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294

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Scholarly Papers (2)

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1.

Temperature-Dependent Oxygen Annealing Effect on the Properties of Ga2o3 Thin Film Deposited by Atomic Layer Deposition

Number of pages: 28 Posted: 04 May 2022
Lin Gu, Hong-Ping Ma, Yi Shen, Jie Zhang, Wen-Jie Chen, Ruo-Yun Yang, Fanzhengshu Wu, Lei Yang, Yu-Hang Zeng, Xi-Rui Wang, Jing-Tao Zhu and Qing-Chun Zhang
Fudan University, Fudan University, Fudan University, Fudan University, Fudan University, Fudan University, Fudan University, affiliation not provided to SSRN, Fudan University, Fudan University, Tongji University and Fudan University
Downloads 161 (464,348)

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Post-deposition oxygen annealing, Gallium oxide, Oxygen vacancy, Optical bandgap, Band alignment

2.

Freestanding Zr-Based Multilayer Filters: Euv Transmission Performance and Irradiation Stability

Number of pages: 17 Posted: 28 Sep 2023
Jing-Tao Zhu, Sheng Guo, Jiaoling Zhao, Xiaoran Li, Jianda Shao, Hongjun Zhou and Tonglin Huo
Tongji University, Tongji University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) and University of Science and Technology of China (USTC)
Downloads 133 (547,599)

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Extreme ultraviolet, Zr-based filters, magnetron sputtering, Multilayer, stability