default author photo

Isabella Farella

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

28

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Raster-Atomic Force Nanolithography: New Insights Towards the Fabrication of 3d Nanostructures on Pmma and Silicon Nitride

Number of pages: 33 Posted: 24 Dec 2024
Lorenzo Vincenti, Paolo Pellegrino, Isabella Farella, Mariafrancesca Cascione, Valeria De Matteis, fabio quaranta and Rosaria Rinaldi
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Salento, University of Salento, affiliation not provided to SSRN and University of Salento
Downloads 28 (1,359,097)

Abstract:

Loading...

Raster-AFM nanolithography, 3D nanolithography, Wet Etching process, ICP_RIE Etching, AFM characterization.