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fabio quaranta

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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Scholarly Papers (2)

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1.

Effect of Silicon-Based Substrates on Sputtered Aln Thin Films: Physical & Chemical Properties and Suitability for Piezoelectric Device Integration

Number of pages: 30 Posted: 16 May 2022
Maria Assunta signore, Luciano Velardi, chiara de pascali, Iren Kuznetsova, Laura Blasi, francesco biscaglia, fabio quaranta, Pietro Siciliano and Luca Francioso
CNR Institute for Microelectroniv and Microsystems, CNR Institute for Microelectroniv and Microsystems, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 133 (558,171)

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aluminium nitride (AlN), atomic force microscopy (AFM), piezoresponce force microscopy (PFM), piezoelectricity, Raman spectroscopy.

2.

Raster-Atomic Force Nanolithography: New Insights Towards the Fabrication of 3d Nanostructures on Pmma and Silicon Nitride

Number of pages: 33 Posted: 24 Dec 2024
Lorenzo Vincenti, Paolo Pellegrino, Isabella Farella, Mariafrancesca Cascione, Valeria De Matteis, fabio quaranta and Rosaria Rinaldi
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Salento, University of Salento, affiliation not provided to SSRN and University of Salento
Downloads 28 (1,359,097)

Abstract:

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Raster-AFM nanolithography, 3D nanolithography, Wet Etching process, ICP_RIE Etching, AFM characterization.