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Luca Francioso

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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184

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Scholarly Papers (2)

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1.

Effect of Silicon-Based Substrates on Sputtered Aln Thin Films: Physical & Chemical Properties and Suitability for Piezoelectric Device Integration

Number of pages: 30 Posted: 16 May 2022
Maria Assunta signore, Luciano Velardi, chiara de pascali, Iren Kuznetsova, Laura Blasi, francesco biscaglia, fabio quaranta, Pietro Siciliano and Luca Francioso
CNR Institute for Microelectroniv and Microsystems, CNR Institute for Microelectroniv and Microsystems, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 133 (558,171)

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aluminium nitride (AlN), atomic force microscopy (AFM), piezoresponce force microscopy (PFM), piezoelectricity, Raman spectroscopy.

2.

Improvement of the Piezoelectric Response of Aln Thin Films Through the Evaluation of the Contact Surface Potential by Piezoresponse Force Microscopy

Number of pages: 19 Posted: 30 Jun 2023
Maria Assunta signore, Luca Francioso, chiara de pascali, antonio serra, daniela manno, gabriele rescio, enrico melissano and Luciano Velardi
CNR Institute for Microelectroniv and Microsystems, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Salento, University of Salento, affiliation not provided to SSRN, affiliation not provided to SSRN and CNR Institute for Microelectroniv and Microsystems
Downloads 51 (1,052,702)

Abstract:

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Aluminum nitride, RF magnetron sputtering, piezoelectric response, Piezoresponse Force Microscopy (PFM), Kelvin Probe Force Microscopy (KPFM), surface potential