aluminium nitride (AlN), atomic force microscopy (AFM), piezoresponce force microscopy (PFM), piezoelectricity, Raman spectroscopy.
Aluminum nitride, RF magnetron sputtering, piezoelectric response, Piezoresponse Force Microscopy (PFM), Kelvin Probe Force Microscopy (KPFM), surface potential
molecular Imprinted Polymers, oral cancer, liquid biopsy, biosensors, artificial receptors