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Ze-Yu Zhou
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Scholarly Papers (1)
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1.
Cross-Axis Bending-Torsion Coupled Dynamic Model for Thermal-Induced Frequency Drift of 2d Mems Micromirrors
Number of pages: 34
Posted: 24 Jan 2025
Ze-Yu Zhou,
Kai-Ming Hu
,
Er-Qi Tu
,
Wen-Ming Zhang
and
Guang Meng
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Shanghai Jiao Tong University (SJTU) - State Key Laboratory of Mechanical System and Vibration and Shanghai Jiao Tong University (SJTU)
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Abstract:
MEMS, Vibration, frequency drift, Reliability, package optimization
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