Skip to main content
Feedback to SSRN
Feedback
(required)
Email
(required)
Submit
Er-Qi Tu
affiliation not provided to SSRN
Contact
affiliation not provided to SSRN
Email
Learn more about SSRN Profiles
SCHOLARLY PAPERS
1
DOWNLOADS
41
TOTAL CITATIONS
0
Feedback
Scholarly Papers (1)
Sort by:
Paper Title, A-Z
Paper Title, Z-A
Author Name, A-Z
Author Name, Z-A
Date Posted, Ascending
Date Posted, Descending
Downloads, Ascending
Downloads, Descending
Citations, Ascending
Citations, Descending
Actions:
Email selected abstracts
View:
Selected
Original List
All Versions
Hide All Versions
All Abstracts
Hide All Abstracts
(Rank)
1.
Cross-Axis Bending-Torsion Coupled Dynamic Model for Thermal-Induced Frequency Drift of 2d Mems Micromirrors
Number of pages: 34
Posted: 24 Jan 2025
Ze-Yu Zhou
,
Kai-Ming Hu
, Er-Qi Tu,
Wen-Ming Zhang
and
Guang Meng
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Shanghai Jiao Tong University (SJTU) - State Key Laboratory of Mechanical System and Vibration and Shanghai Jiao Tong University (SJTU)
Downloads
41
(1,183,237)
View PDF
Download
Abstract:
MEMS, Vibration, frequency drift, Reliability, package optimization
Feedback
