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Chiashain Chuang

Chung Yuan Christian University

22 Pu-Jen, Pu-chung Li

Chung-Li, 32023

Taiwan

  • Chung Yuan Christian University

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Scholarly Papers (1)

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Fabrication of High-Ge-Content Silicon Germanium Film on Sio2/Silicon (111) Patterned Substrate by Epitaxial Lateral Overgrowth

Number of pages: 17 Posted: 20 Jun 2025
Ching Huseh Chiu, Wu-Yih Uen, Ting-Chuan Li, Ching-Yi Liu, Chiashain Chuang, Ji-Lin Shen, Dung-Sheng Tsai, Lung-Hsing Hsu and Hao-Chung Kuo
Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, affiliation not provided to SSRN and National Chiao Tung University
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Abstract:

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high-Ge-content, SiGe, liquid phase epitaxy, epitaxial lateral overgrowth, patterned SiO₂/Si(111) substrate, heteroepitaxial