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Dung-Sheng Tsai

Chung Yuan Christian University

22 Pu-Jen, Pu-chung Li

Chung-Li, 32023

Taiwan

  • Chung Yuan Christian University

SCHOLARLY PAPERS

2

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105

TOTAL CITATIONS

0

Scholarly Papers (2)

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1.

Fabrication of High-Ge-Content Silicon Germanium Film on Sio2/Silicon (111) Patterned Substrate by Epitaxial Lateral Overgrowth

Number of pages: 17 Posted: 20 Jun 2025
Ching Huseh Chiu, Wu-Yih Uen, Ting-Chuan Li, Ching-Yi Liu, Chiashain Chuang, Ji-Lin Shen, Dung-Sheng Tsai, Lung-Hsing Hsu and Hao-Chung Kuo
Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, Chung Yuan Christian University, affiliation not provided to SSRN and National Chiao Tung University
Downloads 56 (1,020,567)

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high-Ge-content, SiGe, liquid phase epitaxy, epitaxial lateral overgrowth, patterned SiO₂/Si(111) substrate, heteroepitaxial

2.

Defect Repair and Dopant Activation in Boron-Implanted Germanium through Integrated Microwave and Supercritical Fluid Treatment

Number of pages: 22 Posted: 08 Oct 2025
Dung-Sheng Tsai, Chen Kuang-Yen, Michael Ira Current and TAI CHEN KUO
Chung Yuan Christian University, Chung Yuan Christian University, Kyoto University and Chung Yuan Christian University
Downloads 49 (1,109,210)

Abstract:

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Boron implantation, Dopant activation, Two-step annealing, Microwave annealing, Supercritical fluids