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Seo-Hyun Lee

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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119

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0

Scholarly Papers (2)

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1.

Atomic Layer Deposition of Selective Sio2 Thin Films Using Silane Self-Assembled Monolayers on Silicon Versus Amorphous Carbon

Number of pages: 8 Posted: 25 Feb 2025
Seo-Hyun Lee, Jeong-Min Lee, Jiwoo Oh, Jieun Oh, Myongjong Kwon, Byungha Park and Woo-Hee Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Hanyang University
Downloads 82 (790,029)

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Area-selective atomic layer deposition, Silicon oxide, Silane self-assembled monolayer, Surface modification, Growth retardation

2.

Atomic Layer Deposition of Hafnium Silicate Thin Films Using a Single Source Precursor

Number of pages: 18 Posted: 07 Jan 2026
Jieun Oh, Seo-Hyun Lee, Jeongbin Lee, Chang Mo Yoon, Daeyeong Kim, Yongjoo Park and Woo-Hee Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Hanyang University
Downloads 37 (1,222,651)

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atomic layer deposition, Hafnium silicate, Single source precursor, High-k dielectric, MOS capacitor