Shih-Ting Chuang

Chang Gung University

Tauyuan

Taiwan

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Impact of Nitrogen Plasma Treatment on the Tin Bottom Electrode and Ferroelectric Properties of Tin/Hf0.5zr0.5o2/Tin Capacitors

Number of pages: 42 Posted: 03 Mar 2025

Tung-Ming Pan, Shih-Ting Chuang, Wei-Che Weng and Jim-Long Her

Chang Gung University, Chang Gung University, Chang Gung University and Chang Gung University

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