Xiaoyu Lu

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Multi-Focal Picosecond Laser Vertical Slicing of 6-Inch 4h-Sic Ingots

Number of pages: 34 Posted: 12 Apr 2025

Shusen Zhao, Jiabao Du, Xiaoyu Lu, Lu Jiang, Shifei Han, Xinyao Li, Haijuan Yu and Xuechun Lin

affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tsinghua University, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN

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