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Shifei Han

Tsinghua University

Beijing, 100084

China

SCHOLARLY PAPERS

1

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73

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0

Scholarly Papers (1)

1.

Multi-Focal Picosecond Laser Vertical Slicing of 6-Inch 4h-Sic Ingots

Number of pages: 34 Posted: 12 Apr 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tsinghua University, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Picosecond laser, Laser Slicing, 4H-SiC, Wavefront shaping, Ultrafast laser processing