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Alexander Fromm
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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Superimposed Hipims/Rf on a Single Magnetron
Number of pages: 7
Posted: 02 May 2025
Jonas Klaus Müller
,
Jan Swoboda
,
Frank Burmeister
, Alexander Fromm,
Marco Wirth
,
Andreas Killinger
and
Sven Ulrich
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,
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,
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,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, University of Stuttgart and Karlsruhe Institute of Technology
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Abstract:
HiPIMS, Superimposed, Reactive sputterig, Hybrid
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