Kaiserstraße 12
Karlsruhe, 76131
Germany
Karlsruhe Institute of Technology
Magnetron sputtering, thin films, plasma modelling, glow discharge, FEM.
hydrogen barrier coating, tungsten carbide, zirconium nitride, diamond like carbon coating, permeation reduction factor
- Inertial electrostatic confinement- Cylindrical IEC- Particle in Cell simulation- Highly ionized Plasma- IPVD
HiPIMS, Superimposed, Reactive sputterig, Hybrid
- Inertial electrostatic confinement-Cylindrical IEC-Cathode transparency-Anode transparency-Electrode transparency-IPVD
MAX phase, physical vapor deposition (PVD), nanoscale multilayers, phase transformations, atom probe tomography (APT)
-Inertial electrostatic confinement-Cylindrical IEC-Spray Jet-Jet Mode-Cathode opening angle-Anode opening angle
adhesion measurement, Raman spectroscopy, diamond on tungsten carbide, x-ray diffraction