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Rolf Grieseler

Pontificia Universidad Catolica del Peru

Av. Universitaria 1801, San Miguel

Lima, Lima 32

Peru

  • Pontificia Universidad Catolica del Peru

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Plasma Parameters Analysis in Dc and Rf Magnetron Sputtering Using Finite Element Method

Number of pages: 13 Posted: 25 May 2024
Noely Zully Calderon, Carlo Becerra, Jose Alfonso Campo, Jaime Paul Carreño, Humberto Torreblanca, Michael Stüber, Sven Ulrich and Rolf Grieseler
affiliation not provided to SSRN, Universidad Nacional de Ingeniería, Universidad Nacional de Ingeniería, Universidad Nacional de Ingeniería, affiliation not provided to SSRN, Karlsruhe Institute of Technology, Karlsruhe Institute of Technology and Pontificia Universidad Catolica del Peru
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Magnetron sputtering, thin films, plasma modelling, glow discharge, FEM.