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Tianxiang Chen

affiliation not provided to SSRN

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SCHOLARLY PAPERS

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Scholarly Papers (1)

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Investigation of Aluminum Coatings Deposited by Rf and Dc Magnetron Sputtering as Optical-Blocking Layers for Optical Blocking Filters

Number of pages: 16 Posted: 31 May 2025
Na Gao, Tianxiang Chen, Yupeng Xu, Huilin He, Yuanyuan Du, Wu Zhenyu and Liu Yichen
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
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Abstract:

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Optical blocking filters, DC magnetron sputtering mode, RF magnetron sputtering mode, UV, visible and infrared light transmittance