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Liu Yichen

Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology

52 Sanlihe Rd.

Datun Road, Anwai

Beijing, 100864

China

  • Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology

SCHOLARLY PAPERS

6

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396

TOTAL CITATIONS

1

Scholarly Papers (6)

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1.

Control Algorithm of a Novel MEMS Fast Steering Mirror for High Precision Beam Pointing

Number of pages: 9 Posted: 05 Dec 2022
Zihao Yu, Wang Lihao, Wang Yang, Zhang Yonggui, Liu Yichen and Wu Zhenyu
Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 159 (472,207)

Abstract:

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MEMS, fast steering mirror, PID control, feedforward drive algorithm, feedback control algorithm

2.

Integrated Piezoresistive Sensor for High-Precision Closed-Loop Control of Piezoelectric Mems Fast Steering Mirror

Number of pages: 8 Posted: 27 Dec 2024
Zhichao Weng, Wenli Xue, Xingwang Zhu, Mingkun Wang, Yongquan Su, Yi Yang, Liu Yichen, Hao Huang, yanlong wang, Ke Xie, Wang Yang, Hao Chen, Wang Lihao and Wu Zhenyu
Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 82 (809,932)
Citation 1

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Integrated PZR sensor, Closed-loop control, Point accuracy, Long-term stability

3.

Electrical Aging of a Piezoelectric Mems Fast Steering Mirror and its Impact on Reliability

Number of pages: 10 Posted: 03 Nov 2023
Weihong Zhu, Yongquan Su, Shiyuan Gao, Xiaodong Li, Zhang Yonggui, Wang Lihao, Liu Yichen, Wang Yang and Wu Zhenyu
Shanghai University, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 67 (933,592)

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ReliabilityPiezoelectric actuatorMEMS FSMLifetimeFailure analysis

4.

A Novel Quasi-Static Mems Piezoelectric Micromirror Array with a High Fill Factor and Three Degrees of Freedom

Number of pages: 8 Posted: 06 Feb 2024
Yongquan Su, Liu Yichen, Wang Yang, Qianying Sun, Qifeng Qiao, Zhichao Weng, Wang Lihao and Zhenyu Wu
Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 49 (1,086,013)

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Piezoelectric micromirror array, Quasi-static micromirror, High fill factor, Three degree of freedom

5.

Investigation of Aluminum Coatings Deposited by Rf and Dc Magnetron Sputtering as Optical-Blocking Layers for Optical Blocking Filters

Number of pages: 16 Posted: 31 May 2025
Na Gao, Tianxiang Chen, Yupeng Xu, Huilin He, Yuanyuan Du, Wu Zhenyu and Liu Yichen
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 21 (1,448,301)

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Optical blocking filters, DC magnetron sputtering mode, RF magnetron sputtering mode, UV, visible and infrared light transmittance

6.

A Novel Heat-Resistant Vias-First Tsv Mems Silicon Substrate for High Density 2.5d/3d Interposer Application

Number of pages: 10 Posted: 30 Apr 2025
yanlong wang, Yongquan Su, Liu Yichen, Wang Lihao, Zhichao Weng, Ke Xie, Yi Yang, Jihua Zhang and Wu Zhenyu
affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Shanghai University, Shanghai University, affiliation not provided to SSRN, affiliation not provided to SSRN and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 18 (1,500,778)

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Silicon vias-first TSVDRIEPolymer solution fillingDielectric performance evaluation