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Qifeng Qiao

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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A Novel Quasi-Static Mems Piezoelectric Micromirror Array with a High Fill Factor and Three Degrees of Freedom

Number of pages: 8 Posted: 06 Feb 2024
Yongquan Su, Liu Yichen, Wang Yang, Qianying Sun, Qifeng Qiao, Zhichao Weng, Wang Lihao and Zhenyu Wu
Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
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Piezoelectric micromirror array, Quasi-static micromirror, High fill factor, Three degree of freedom