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Yongquan Su

Shanghai University

149 Yanchang Road

SHANGDA ROAD 99

Shanghai 200072, 200444

China

  • Shanghai University

SCHOLARLY PAPERS

2

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116

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0

Scholarly Papers (2)

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1.

Electrical Aging of a Piezoelectric Mems Fast Steering Mirror and its Impact on Reliability

Number of pages: 10 Posted: 03 Nov 2023
Weihong Zhu, Yongquan Su, Shiyuan Gao, Xiaodong Li, Zhang Yonggui, Wang Lihao, Liu Yichen, Wang Yang and Wu Zhenyu
Shanghai University, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 67 (933,592)

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ReliabilityPiezoelectric actuatorMEMS FSMLifetimeFailure analysis

2.

A Novel Quasi-Static Mems Piezoelectric Micromirror Array with a High Fill Factor and Three Degrees of Freedom

Number of pages: 8 Posted: 06 Feb 2024
Yongquan Su, Liu Yichen, Wang Yang, Qianying Sun, Qifeng Qiao, Zhichao Weng, Wang Lihao and Zhenyu Wu
Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
Downloads 49 (1,086,013)

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Piezoelectric micromirror array, Quasi-static micromirror, High fill factor, Three degree of freedom