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Hao Huang

Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology

52 Sanlihe Rd.

Datun Road, Anwai

Beijing, 100864

China

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Scholarly Papers (1)

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Integrated Piezoresistive Sensor for High-Precision Closed-Loop Control of Piezoelectric Mems Fast Steering Mirror

Number of pages: 8 Posted: 27 Dec 2024
Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, affiliation not provided to SSRN, Shanghai University, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology and Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology
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Abstract:

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Integrated PZR sensor, Closed-loop control, Point accuracy, Long-term stability