Jungjae Park

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Synergistic Effects of Surfactants on Ceria Removal Efficiency During Sc1-Based Post-Cmp Cleaning

Number of pages: 26 Posted: 10 Jun 2025

Ju Yong Lee, Chulwoo Bae, Jungjae Park, Jongjin Kim and Taesung Kim

affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Sungkyunkwan University

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