Georgia Kaufman

Sandia National Laboratories

P.O. Box 969

Livermore, CA 94551

United States

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Multiphoton Lithographic Approach for Fabrication of Planar-Type Mems

Number of pages: 36 Posted: 15 Jun 2025

Kyler Kunzler, Emily Huntley, Georgia Kaufman, Michael Gallegos, Bryan Kaehr and Tim Dallas

Texas Tech University, Sandia National Laboratories, Sandia National Laboratories, Sandia National Laboratories, Sandia National Laboratories and Texas Tech University

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