Tim Dallas

Texas Tech University

2500 Broadway

Lubbock, TX 79409

United States

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Multiphoton Lithographic Approach for Fabrication of Planar-Type Mems

Number of pages: 36 Posted: 15 Jun 2025

Kyler Kunzler, Emily Huntley, Georgia Kaufman, Michael Gallegos, Bryan Kaehr and Tim Dallas

Texas Tech University, Sandia National Laboratories, Sandia National Laboratories, Sandia National Laboratories, Sandia National Laboratories and Texas Tech University

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