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Anne-Flore Mallet

STMicroelectronics

16 Rue Pierre et Marie Curie

Tours, 37100

France

  • STMicroelectronics

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Scholarly Papers (1)

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Advanced Process for the Fabrication of Defect-Free Ge-Rich Sige on Insulator Layers

Number of pages: 22 Posted: 09 Jul 2025
Isabelle Berbezier, Anne-Flore Mallet, olivier gourhant, Adam Arette-Hourquet, Mansour Aouassa, christophe duluard, Romain Duru and luc favre
Aix-Marseille University, STMicroelectronics, STMicroelectronics, affiliation not provided to SSRN, Jouf University, STMicroelectronics, STMicroelectronics and affiliation not provided to SSRN
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Abstract:

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MOSFET, advanced 300mm industrial process, Fully Depleted Silicon Germanium-On-Insulator, band-gap engineering, fully strained SiGe