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Effect of Atomic Layer Etching on the Surface Damage Removal of Gan-Based Light Emitting Diodes

Number of pages: 50 Posted: 14 Jul 2025

Chan Ho Kim, Jong Woo Hong, Woong Sun Lim, Ja Yeon Kim, Kyung Lim Kim, Jong Soon Park, Yun Jae Park, Eun Koo Kim, Hyeong Joon Eoh, Jun Won Jeong, Sung Hyun Kim, Young Woo Jeon, Geun Young Yeom and Dong Woo Kim

affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sungkyunkwan University and Sungkyunkwan University

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Chan Ho Kim

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Scholarly Papers (1)

Effect of Atomic Layer Etching on the Surface Damage Removal of Gan-Based Light Emitting Diodes

Abstract: