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Sung Hyun Kim
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Effect of Atomic Layer Etching on the Surface Damage Removal of Gan-Based Light Emitting Diodes
Number of pages: 50
Posted: 14 Jul 2025
Chan Ho Kim
,
Jong Woo Hong
,
Woong Sun Lim
,
Ja Yeon Kim
,
Kyung Lim Kim
,
Jong Soon Park
,
Yun Jae Park
,
Eun Koo Kim
,
Hyeong Joon Eoh
,
Jun Won Jeong
, Sung Hyun Kim,
Young Woo Jeon
,
Geun Young Yeom
and
Dong Woo Kim
affiliation not provided to SSRN
, Sungkyunkwan University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Sungkyunkwan University and Sungkyunkwan University
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Abstract:
GaN, LED, ALE, dry etch, MQW, wet etch
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