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Zhao ze Li

Dalian University of Technology

Huiying Rd

DaLian, LiaoNing, 116024

China

  • Dalian University of Technology

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Prediction Model and Experimental Verification of Surface Roughness of Single Crystal Diamond Chemical Mechanical Polishing Based on Archimedes Optimization Algorithm

Number of pages: 36 Posted: 23 Aug 2025
Zhao ze Li, Xiaoguang Guo, Guanghui Fan, Zhuang Song, Renke Kang and Xuefei Wang
Dalian University of Technology, Dalian University of Technology, Dalian University of Technology, Dalian University of Technology, Dalian University of Technology and Dalian University of Technology
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Abstract:

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Single crystal diamond, chemical mechanical polishing, Archimedes optimization algorithm, Roughness prediction model