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Munja Kim
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Free-standing hybrid Zr/NGF filter for high-power EUV purification in EUV lithography
Number of pages: 14
Posted: 13 Oct 2025
Dong-Wook Shin
,
Myeong Jin Jeong
,
Ki-bong Nam
, Munja Kim and
Ji-Beom Yoo
Hanbat National University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
and Sungkyunkwan University
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Abstract:
EUV, spectral purity filter, NGF, emissivity, flexible substrate
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