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Ji-Beom Yoo

Sungkyunkwan University

53 Myeongnyun-dong 3-ga Jongno-ju

Guro-gu

Seoul, 110-745

Korea, Republic of (South Korea)

  • Sungkyunkwan University

SCHOLARLY PAPERS

2

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109

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0

Scholarly Papers (2)

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1.

Free-standing hybrid Zr/NGF filter for high-power EUV purification in EUV lithography

Number of pages: 14 Posted: 13 Oct 2025
Dong-Wook Shin, Myeong Jin Jeong, Ki-bong Nam, Munja Kim and Ji-Beom Yoo
Hanbat National University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Sungkyunkwan University
Downloads 92 (747,755)

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EUV, spectral purity filter, NGF, emissivity, flexible substrate

2.

Graphite Evolution by Metal Induced Crystallization of Amorphous Carbon on Sinx Substrate for Extreme Ultraviolet Pellicles

Number of pages: 34 Posted: 21 Jun 2025
Hye-Young Kim, Seul-Gi Kim, Yongkyung Kim, Kihun Seong, Jun-Hyeok Jeon, Jiho Kim, Sungil Kim, Sangsul Lee, Ji-Beom Yoo, Hyun-Mi Kim and Hyeongkeun Kim
Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Korea Electronics Technology Institute, affiliation not provided to SSRN, Sungkyunkwan University, Korea Electronics Technology Institute and Korea Electronics Technology Institute
Downloads 17 (1,481,165)

Abstract:

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Graphite, metal induced crystallization, EUV pellicle