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Sangsul Lee
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Graphite Evolution by Metal Induced Crystallization of Amorphous Carbon on Sinx Substrate for Extreme Ultraviolet Pellicles
Number of pages: 34
Posted: 21 Jun 2025
Hye-Young Kim
,
Seul-Gi Kim
,
Yongkyung Kim
,
Kihun Seong
,
Jun-Hyeok Jeon
,
Jiho Kim
,
Sungil Kim
, Sangsul Lee,
Ji-Beom Yoo
,
Hyun-Mi Kim
and
Hyeongkeun Kim
Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Korea Electronics Technology Institute,
affiliation not provided to SSRN
, Sungkyunkwan University, Korea Electronics Technology Institute and Korea Electronics Technology Institute
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Abstract:
Graphite, metal induced crystallization, EUV pellicle
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