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Jiho Kim

Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory

SCHOLARLY PAPERS

2

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90

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Scholarly Papers (2)

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1.

In situ and nanoscale spectroscopic analysis of soft X-ray-induced transformations in indium nitrate films for lithographic applications

Number of pages: 21 Posted: 13 Dec 2025
Seungchul Choi, Youngchan Kim, Hyun Su Park, Minseon Gu, J. Baik, Jiho Kim, Eunjip Choi, Hyuk Jin Kim and Young Jun Chang
University of Seoul, University of Seoul, University of Seoul, Gyeongsang National University, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, University of Seoul, University of Seoul and University of Seoul
Downloads 73 (867,774)

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Photoresist, Extreme ultraviolet lithography, X-ray lithography, In situ XPS, Scanning photoelectron microscopy, Indium nitrate

2.

Graphite Evolution by Metal Induced Crystallization of Amorphous Carbon on Sinx Substrate for Extreme Ultraviolet Pellicles

Number of pages: 34 Posted: 21 Jun 2025
Hye-Young Kim, Seul-Gi Kim, Yongkyung Kim, Kihun Seong, Jun-Hyeok Jeon, Jiho Kim, Sungil Kim, Sangsul Lee, Ji-Beom Yoo, Hyun-Mi Kim and Hyeongkeun Kim
Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Korea Electronics Technology Institute, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Korea Electronics Technology Institute, affiliation not provided to SSRN, Sungkyunkwan University, Korea Electronics Technology Institute and Korea Electronics Technology Institute
Downloads 17 (1,481,165)

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Graphite, metal induced crystallization, EUV pellicle