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Minseon Gu

Gyeongsang National University

Chinju City

Korea, Republic of (South Korea)

  • Gyeongsang National University

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In situ and nanoscale spectroscopic analysis of soft X-ray-induced transformations in indium nitrate films for lithographic applications

Number of pages: 21 Posted: 13 Dec 2025
Seungchul Choi, Youngchan Kim, Hyun Su Park, Minseon Gu, J. Baik, Jiho Kim, Eunjip Choi, Hyuk Jin Kim and Young Jun Chang
University of Seoul, University of Seoul, University of Seoul, Gyeongsang National University, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, University of Seoul, University of Seoul and University of Seoul
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Abstract:

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Photoresist, Extreme ultraviolet lithography, X-ray lithography, In situ XPS, Scanning photoelectron microscopy, Indium nitrate