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Seungchul Choi

University of Seoul

Seoul

Korea, Republic of (South Korea)

SCHOLARLY PAPERS

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Scholarly Papers (1)

1.

In situ and nanoscale spectroscopic analysis of soft X-ray-induced transformations in indium nitrate films for lithographic applications

Number of pages: 21 Posted: 13 Dec 2025
University of Seoul, University of Seoul, University of Seoul, Gyeongsang National University, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory, University of Seoul, University of Seoul and University of Seoul
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Abstract:

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Photoresist, Extreme ultraviolet lithography, X-ray lithography, In situ XPS, Scanning photoelectron microscopy, Indium nitrate