77 Cheongam-ro
Pohang
Korea, Republic of (South Korea)
Pohang University of Science and Technology (POSTECH) - Pohang Accelerator Laboratory
Photoresist, Extreme ultraviolet lithography, X-ray lithography, In situ XPS, Scanning photoelectron microscopy, Indium nitrate
Scanning photoelectron microscopy (SPEM), High aspect ratio contact hole, Nanoscale inspection methodology, Focused X-ray beam
Korea-4GSR, Heat load, thermal analysis, Thermal gradient, thermal deformation
Surface oxygen vacancy, NaBH4 calcined Ir-doped SnO2 NPs, Photocatalytic activity, x-ray photoelectron spectroscopy, DFT calculation