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Yaxuan Zhang

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Enhanced silicon wafer chemical mechanical polishing slurry containing lysine-catalyzed synthesis silica abrasives and organo-superbase

Number of pages: 26 Posted: 15 Oct 2025
Wenzhong Wang, Wenqing Jia, Chuanqi Zhang, Wu Zhang, Yaxuan Zhang, Ling Zhang, Mengya Xu and Yongsheng Wu
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Chemical mechanical polishing, Silicon wafer, Silica abrasives, Organo-superbase, Amino acid, Ultrasmooth surface