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Scholarly Papers (1)
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1.
Physical feature-based machine learning of BEOL thermal conductivity in 3D ICs
Number of pages: 5
Posted: 18 Oct 2025
Yunting Liu
,
Rong Fu
,
Jixiang Zhu
, Kun Zhang,
Chuan Chen
,
Jun Li
and
Liqiang Cao
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,
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,
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,
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,
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,
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and State Key Lab. of Metal Matrix Composites, Key Lab. for Thin Film and Microfabrication Technology of the Ministry of Education, School of Materials Science and Eng., Shanghai Jiao Tong University
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