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Xuefang Wang

affiliation not provided to SSRN

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Structural Accuracy Control of Ion Beam Angled Etching of Diamond in Ar/O2 Gas Mixture: Formation Mechanism Considering the Lateral Erosion of Aluminum Mask

Number of pages: 19 Posted: 28 Oct 2025
Yuqingyun Du, Xiaoyang Wen, Ziqi Xiao, Xianshan Dong, Junfeng Xiao, Xuefang Wang, Jianfeng Xu, Lingqi Feng, Zhenyang Shi and Xiao Huang
Huazhong University of Science and Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Huazhong University of Science and Technology, affiliation not provided to SSRN, Huazhong University of Science and Technology, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Single crystal diamondIon beam angled etchingArgon-oxygen mixtureInverted cone angleFormation mechanismStructural accuracy